Ring-oscillator process monitors give production test teams a fast on-die frequency measurement for identifying CMOS process variation and sorting dies at wafer level. A process monitor is a dedicated ...

Abstract: The scanning electron microscope (SEM) is vital in wafer processing, providing high-res surface images for defect analysis. Despite optimizations, images may have noise and edge jitter from ...

Abstract: In the periodic scheduling problems of a dual-arm wafer-residency-time-constrained (W-R-T-C) cluster tool (CT) with multivariety wafers, it is important to balance workload at each step.

Imec and semiconductor equipment supplier EV Group (EVG) have demonstrated a wafer-to-wafer hybrid bonding process capable of achieving a 200-nanometre copper interconnect pitch, marking a step ...